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Size an axisSizing

All applications

In a cleanroom, what matters is what the axis does not shed.

Task

A handling gantry above a row of process tools has to move wafers between stations. Every particle the axis itself produces ends up on the product.

Solution

We build the gantry from two LD-190 axes in the horizontal plane and one LH-90 as the vertical axis. The LD has no belt that could produce abrasion, and it runs with encapsulated guide blocks and extraction at both head pieces.

Handling in the cleanroom, without abrasion and without belts.
ISO 5Cleanroom class
±0,002 mmRepeatability
1,4 sCycle per wafer
0Belts in the machine

Why no toothed belt

A toothed belt sheds material over its service life. In a cleanroom that is the one source you cannot switch off without changing the drive.

Extraction at both ends

Each head piece carries a port for the cleanroom extraction. Air is guided along the profile slot and carries away whatever the guide blocks produce.

The vertical axis holds during an emergency stop

Nothing may drop above the product. The LH-90 carries a spring-applied brake that engages at every emergency stop, and it is tested at twice the rated load.

Series used

All applications

Battery production

An axis running three shifts covers more distance in a year than a delivery van.

Long travel in three-shift operation, sized by distance covered.

Medical technology

When every joint has to be provable, the axis becomes a measuring instrument.

Joining with a recorded force curve, traceable for ten years.